JPS5537238U - - Google Patents

Info

Publication number
JPS5537238U
JPS5537238U JP11956278U JP11956278U JPS5537238U JP S5537238 U JPS5537238 U JP S5537238U JP 11956278 U JP11956278 U JP 11956278U JP 11956278 U JP11956278 U JP 11956278U JP S5537238 U JPS5537238 U JP S5537238U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11956278U
Other languages
Japanese (ja)
Other versions
JPS5740518Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11956278U priority Critical patent/JPS5740518Y2/ja
Publication of JPS5537238U publication Critical patent/JPS5537238U/ja
Application granted granted Critical
Publication of JPS5740518Y2 publication Critical patent/JPS5740518Y2/ja
Expired legal-status Critical Current

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Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP11956278U 1978-08-31 1978-08-31 Expired JPS5740518Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11956278U JPS5740518Y2 (enrdf_load_stackoverflow) 1978-08-31 1978-08-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11956278U JPS5740518Y2 (enrdf_load_stackoverflow) 1978-08-31 1978-08-31

Publications (2)

Publication Number Publication Date
JPS5537238U true JPS5537238U (enrdf_load_stackoverflow) 1980-03-10
JPS5740518Y2 JPS5740518Y2 (enrdf_load_stackoverflow) 1982-09-06

Family

ID=29074950

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11956278U Expired JPS5740518Y2 (enrdf_load_stackoverflow) 1978-08-31 1978-08-31

Country Status (1)

Country Link
JP (1) JPS5740518Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140774U (ja) * 1984-02-27 1985-09-18 富士通株式会社 分子線エピタキシヤル成長装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140774U (ja) * 1984-02-27 1985-09-18 富士通株式会社 分子線エピタキシヤル成長装置

Also Published As

Publication number Publication date
JPS5740518Y2 (enrdf_load_stackoverflow) 1982-09-06

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