JPS553713B2 - - Google Patents

Info

Publication number
JPS553713B2
JPS553713B2 JP844276A JP844276A JPS553713B2 JP S553713 B2 JPS553713 B2 JP S553713B2 JP 844276 A JP844276 A JP 844276A JP 844276 A JP844276 A JP 844276A JP S553713 B2 JPS553713 B2 JP S553713B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP844276A
Other languages
Japanese (ja)
Other versions
JPS5198525A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP844276A priority Critical patent/JPS553713B2/ja
Publication of JPS5198525A publication Critical patent/JPS5198525A/ja
Publication of JPS553713B2 publication Critical patent/JPS553713B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Operated Instructional Devices (AREA)
  • Time-Division Multiplex Systems (AREA)
  • Interconnected Communication Systems, Intercoms, And Interphones (AREA)
JP844276A 1976-01-30 1976-01-30 Expired JPS553713B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP844276A JPS553713B2 (en:Method) 1976-01-30 1976-01-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP844276A JPS553713B2 (en:Method) 1976-01-30 1976-01-30

Publications (2)

Publication Number Publication Date
JPS5198525A JPS5198525A (en:Method) 1976-08-30
JPS553713B2 true JPS553713B2 (en:Method) 1980-01-26

Family

ID=11693231

Family Applications (1)

Application Number Title Priority Date Filing Date
JP844276A Expired JPS553713B2 (en:Method) 1976-01-30 1976-01-30

Country Status (1)

Country Link
JP (1) JPS553713B2 (en:Method)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5691571A (en) * 1994-12-28 1997-11-25 Nec Corporation Semiconductor device having fine contact hole with high aspect ratio

Also Published As

Publication number Publication date
JPS5198525A (en:Method) 1976-08-30

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