JPS5537101B2 - - Google Patents

Info

Publication number
JPS5537101B2
JPS5537101B2 JP15048976A JP15048976A JPS5537101B2 JP S5537101 B2 JPS5537101 B2 JP S5537101B2 JP 15048976 A JP15048976 A JP 15048976A JP 15048976 A JP15048976 A JP 15048976A JP S5537101 B2 JPS5537101 B2 JP S5537101B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15048976A
Other languages
Japanese (ja)
Other versions
JPS5373972A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15048976A priority Critical patent/JPS5373972A/ja
Publication of JPS5373972A publication Critical patent/JPS5373972A/ja
Publication of JPS5537101B2 publication Critical patent/JPS5537101B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Weting (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP15048976A 1976-12-14 1976-12-14 Manufacture for semiconductor device Granted JPS5373972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15048976A JPS5373972A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15048976A JPS5373972A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5373972A JPS5373972A (en) 1978-06-30
JPS5537101B2 true JPS5537101B2 (US06815460-20041109-C00097.png) 1980-09-25

Family

ID=15497979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15048976A Granted JPS5373972A (en) 1976-12-14 1976-12-14 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5373972A (US06815460-20041109-C00097.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58105551A (ja) * 1981-11-20 1983-06-23 Fujitsu Ltd 半導体装置

Also Published As

Publication number Publication date
JPS5373972A (en) 1978-06-30

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