JPS5537100B2 - - Google Patents

Info

Publication number
JPS5537100B2
JPS5537100B2 JP4954176A JP4954176A JPS5537100B2 JP S5537100 B2 JPS5537100 B2 JP S5537100B2 JP 4954176 A JP4954176 A JP 4954176A JP 4954176 A JP4954176 A JP 4954176A JP S5537100 B2 JPS5537100 B2 JP S5537100B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4954176A
Other languages
Japanese (ja)
Other versions
JPS52132783A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4954176A priority Critical patent/JPS52132783A/ja
Publication of JPS52132783A publication Critical patent/JPS52132783A/ja
Publication of JPS5537100B2 publication Critical patent/JPS5537100B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP4954176A 1976-04-30 1976-04-30 Electron ray exposure unit Granted JPS52132783A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4954176A JPS52132783A (en) 1976-04-30 1976-04-30 Electron ray exposure unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4954176A JPS52132783A (en) 1976-04-30 1976-04-30 Electron ray exposure unit

Publications (2)

Publication Number Publication Date
JPS52132783A JPS52132783A (en) 1977-11-07
JPS5537100B2 true JPS5537100B2 (US20100223739A1-20100909-C00005.png) 1980-09-25

Family

ID=12834036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4954176A Granted JPS52132783A (en) 1976-04-30 1976-04-30 Electron ray exposure unit

Country Status (1)

Country Link
JP (1) JPS52132783A (US20100223739A1-20100909-C00005.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5357761A (en) * 1976-11-04 1978-05-25 Fujitsu Ltd Electron beam exposure apparatus

Also Published As

Publication number Publication date
JPS52132783A (en) 1977-11-07

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