JPS5537099B2 - - Google Patents

Info

Publication number
JPS5537099B2
JPS5537099B2 JP5669972A JP5669972A JPS5537099B2 JP S5537099 B2 JPS5537099 B2 JP S5537099B2 JP 5669972 A JP5669972 A JP 5669972A JP 5669972 A JP5669972 A JP 5669972A JP S5537099 B2 JPS5537099 B2 JP S5537099B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5669972A
Other languages
Japanese (ja)
Other versions
JPS4917975A (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5669972A priority Critical patent/JPS5537099B2/ja
Publication of JPS4917975A publication Critical patent/JPS4917975A/ja
Publication of JPS5537099B2 publication Critical patent/JPS5537099B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5669972A 1972-06-06 1972-06-06 Expired JPS5537099B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5669972A JPS5537099B2 (enrdf_load_stackoverflow) 1972-06-06 1972-06-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5669972A JPS5537099B2 (enrdf_load_stackoverflow) 1972-06-06 1972-06-06

Publications (2)

Publication Number Publication Date
JPS4917975A JPS4917975A (enrdf_load_stackoverflow) 1974-02-16
JPS5537099B2 true JPS5537099B2 (enrdf_load_stackoverflow) 1980-09-25

Family

ID=13034697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5669972A Expired JPS5537099B2 (enrdf_load_stackoverflow) 1972-06-06 1972-06-06

Country Status (1)

Country Link
JP (1) JPS5537099B2 (enrdf_load_stackoverflow)

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
APPLIED OPTICS=1966 *
PROCEEDINGS OF THE IEEE=1969 *

Also Published As

Publication number Publication date
JPS4917975A (enrdf_load_stackoverflow) 1974-02-16

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