JPS5536929B2 - - Google Patents
Info
- Publication number
- JPS5536929B2 JPS5536929B2 JP2180272A JP2180272A JPS5536929B2 JP S5536929 B2 JPS5536929 B2 JP S5536929B2 JP 2180272 A JP2180272 A JP 2180272A JP 2180272 A JP2180272 A JP 2180272A JP S5536929 B2 JPS5536929 B2 JP S5536929B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Optical Transform (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2180272A JPS5536929B2 (de) | 1972-03-02 | 1972-03-02 | |
US00252020A US3739247A (en) | 1971-05-17 | 1972-05-10 | Positioning device using photoelectric scanning |
NL7206653A NL7206653A (de) | 1971-05-17 | 1972-05-17 | |
DE2224083A DE2224083C3 (de) | 1971-05-17 | 1972-05-17 | Photoelektrische Positioniereinrichtung |
GB2324672A GB1396691A (en) | 1971-05-17 | 1972-05-17 | Positioning device using photoelectric scanning |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2180272A JPS5536929B2 (de) | 1972-03-02 | 1972-03-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4890547A JPS4890547A (de) | 1973-11-26 |
JPS5536929B2 true JPS5536929B2 (de) | 1980-09-25 |
Family
ID=12065175
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2180272A Expired JPS5536929B2 (de) | 1971-05-17 | 1972-03-02 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5536929B2 (de) |
-
1972
- 1972-03-02 JP JP2180272A patent/JPS5536929B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS4890547A (de) | 1973-11-26 |