JPS5536929B2 - - Google Patents

Info

Publication number
JPS5536929B2
JPS5536929B2 JP2180272A JP2180272A JPS5536929B2 JP S5536929 B2 JPS5536929 B2 JP S5536929B2 JP 2180272 A JP2180272 A JP 2180272A JP 2180272 A JP2180272 A JP 2180272A JP S5536929 B2 JPS5536929 B2 JP S5536929B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2180272A
Other languages
Japanese (ja)
Other versions
JPS4890547A (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2180272A priority Critical patent/JPS5536929B2/ja
Priority to US00252020A priority patent/US3739247A/en
Priority to NL7206653A priority patent/NL7206653A/xx
Priority to DE2224083A priority patent/DE2224083C3/de
Priority to GB2324672A priority patent/GB1396691A/en
Publication of JPS4890547A publication Critical patent/JPS4890547A/ja
Publication of JPS5536929B2 publication Critical patent/JPS5536929B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Optical Transform (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2180272A 1971-05-17 1972-03-02 Expired JPS5536929B2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2180272A JPS5536929B2 (de) 1972-03-02 1972-03-02
US00252020A US3739247A (en) 1971-05-17 1972-05-10 Positioning device using photoelectric scanning
NL7206653A NL7206653A (de) 1971-05-17 1972-05-17
DE2224083A DE2224083C3 (de) 1971-05-17 1972-05-17 Photoelektrische Positioniereinrichtung
GB2324672A GB1396691A (en) 1971-05-17 1972-05-17 Positioning device using photoelectric scanning

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2180272A JPS5536929B2 (de) 1972-03-02 1972-03-02

Publications (2)

Publication Number Publication Date
JPS4890547A JPS4890547A (de) 1973-11-26
JPS5536929B2 true JPS5536929B2 (de) 1980-09-25

Family

ID=12065175

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2180272A Expired JPS5536929B2 (de) 1971-05-17 1972-03-02

Country Status (1)

Country Link
JP (1) JPS5536929B2 (de)

Also Published As

Publication number Publication date
JPS4890547A (de) 1973-11-26

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