JPS5536801Y2 - - Google Patents

Info

Publication number
JPS5536801Y2
JPS5536801Y2 JP886476U JP886476U JPS5536801Y2 JP S5536801 Y2 JPS5536801 Y2 JP S5536801Y2 JP 886476 U JP886476 U JP 886476U JP 886476 U JP886476 U JP 886476U JP S5536801 Y2 JPS5536801 Y2 JP S5536801Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP886476U
Other languages
Japanese (ja)
Other versions
JPS52100755U (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP886476U priority Critical patent/JPS5536801Y2/ja
Publication of JPS52100755U publication Critical patent/JPS52100755U/ja
Application granted granted Critical
Publication of JPS5536801Y2 publication Critical patent/JPS5536801Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP886476U 1976-01-28 1976-01-28 Expired JPS5536801Y2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP886476U JPS5536801Y2 (en:Method) 1976-01-28 1976-01-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP886476U JPS5536801Y2 (en:Method) 1976-01-28 1976-01-28

Publications (2)

Publication Number Publication Date
JPS52100755U JPS52100755U (en:Method) 1977-07-30
JPS5536801Y2 true JPS5536801Y2 (en:Method) 1980-08-29

Family

ID=28469314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP886476U Expired JPS5536801Y2 (en:Method) 1976-01-28 1976-01-28

Country Status (1)

Country Link
JP (1) JPS5536801Y2 (en:Method)

Also Published As

Publication number Publication date
JPS52100755U (en:Method) 1977-07-30

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