JPS553674B2 - - Google Patents

Info

Publication number
JPS553674B2
JPS553674B2 JP10423775A JP10423775A JPS553674B2 JP S553674 B2 JPS553674 B2 JP S553674B2 JP 10423775 A JP10423775 A JP 10423775A JP 10423775 A JP10423775 A JP 10423775A JP S553674 B2 JPS553674 B2 JP S553674B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10423775A
Other languages
Japanese (ja)
Other versions
JPS5228370A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10423775A priority Critical patent/JPS5228370A/ja
Publication of JPS5228370A publication Critical patent/JPS5228370A/ja
Publication of JPS553674B2 publication Critical patent/JPS553674B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Electric Properties And Detecting Electric Faults (AREA)
JP10423775A 1975-08-28 1975-08-28 Method of measuring minute undesired modes Granted JPS5228370A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10423775A JPS5228370A (en) 1975-08-28 1975-08-28 Method of measuring minute undesired modes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10423775A JPS5228370A (en) 1975-08-28 1975-08-28 Method of measuring minute undesired modes

Publications (2)

Publication Number Publication Date
JPS5228370A JPS5228370A (en) 1977-03-03
JPS553674B2 true JPS553674B2 (enExample) 1980-01-26

Family

ID=14375342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10423775A Granted JPS5228370A (en) 1975-08-28 1975-08-28 Method of measuring minute undesired modes

Country Status (1)

Country Link
JP (1) JPS5228370A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2965147D1 (en) * 1979-09-21 1983-05-11 Censor Patent Versuch Process for the transfer of a pattern to a semiconductor slice

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515084A (ja) * 1974-06-29 1976-01-16 Nippon Telegraph & Telephone Fuyomoodotokuseisokuteisochi

Also Published As

Publication number Publication date
JPS5228370A (en) 1977-03-03

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