JPS553643Y2 - - Google Patents
Info
- Publication number
- JPS553643Y2 JPS553643Y2 JP14283172U JP14283172U JPS553643Y2 JP S553643 Y2 JPS553643 Y2 JP S553643Y2 JP 14283172 U JP14283172 U JP 14283172U JP 14283172 U JP14283172 U JP 14283172U JP S553643 Y2 JPS553643 Y2 JP S553643Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14283172U JPS553643Y2 (en:Method) | 1972-12-12 | 1972-12-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14283172U JPS553643Y2 (en:Method) | 1972-12-12 | 1972-12-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4999158U JPS4999158U (en:Method) | 1974-08-27 |
| JPS553643Y2 true JPS553643Y2 (en:Method) | 1980-01-28 |
Family
ID=28424778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14283172U Expired JPS553643Y2 (en:Method) | 1972-12-12 | 1972-12-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS553643Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9343263B2 (en) | 2014-03-14 | 2016-05-17 | Sumitomo Heavy Industries Ion Technology Co., Ltd. | Ion implanter, beam energy measuring device, and method of measuring beam energy |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5358769A (en) * | 1976-11-08 | 1978-05-26 | Fujitsu Ltd | Ion injector |
-
1972
- 1972-12-12 JP JP14283172U patent/JPS553643Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9343263B2 (en) | 2014-03-14 | 2016-05-17 | Sumitomo Heavy Industries Ion Technology Co., Ltd. | Ion implanter, beam energy measuring device, and method of measuring beam energy |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4999158U (en:Method) | 1974-08-27 |