JPS553643Y2 - - Google Patents

Info

Publication number
JPS553643Y2
JPS553643Y2 JP14283172U JP14283172U JPS553643Y2 JP S553643 Y2 JPS553643 Y2 JP S553643Y2 JP 14283172 U JP14283172 U JP 14283172U JP 14283172 U JP14283172 U JP 14283172U JP S553643 Y2 JPS553643 Y2 JP S553643Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14283172U
Other languages
Japanese (ja)
Other versions
JPS4999158U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14283172U priority Critical patent/JPS553643Y2/ja
Publication of JPS4999158U publication Critical patent/JPS4999158U/ja
Application granted granted Critical
Publication of JPS553643Y2 publication Critical patent/JPS553643Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
JP14283172U 1972-12-12 1972-12-12 Expired JPS553643Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14283172U JPS553643Y2 (enrdf_load_stackoverflow) 1972-12-12 1972-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14283172U JPS553643Y2 (enrdf_load_stackoverflow) 1972-12-12 1972-12-12

Publications (2)

Publication Number Publication Date
JPS4999158U JPS4999158U (enrdf_load_stackoverflow) 1974-08-27
JPS553643Y2 true JPS553643Y2 (enrdf_load_stackoverflow) 1980-01-28

Family

ID=28424778

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14283172U Expired JPS553643Y2 (enrdf_load_stackoverflow) 1972-12-12 1972-12-12

Country Status (1)

Country Link
JP (1) JPS553643Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9343263B2 (en) 2014-03-14 2016-05-17 Sumitomo Heavy Industries Ion Technology Co., Ltd. Ion implanter, beam energy measuring device, and method of measuring beam energy

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5358769A (en) * 1976-11-08 1978-05-26 Fujitsu Ltd Ion injector

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9343263B2 (en) 2014-03-14 2016-05-17 Sumitomo Heavy Industries Ion Technology Co., Ltd. Ion implanter, beam energy measuring device, and method of measuring beam energy

Also Published As

Publication number Publication date
JPS4999158U (enrdf_load_stackoverflow) 1974-08-27

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