JPS5536270B2 - - Google Patents

Info

Publication number
JPS5536270B2
JPS5536270B2 JP9839375A JP9839375A JPS5536270B2 JP S5536270 B2 JPS5536270 B2 JP S5536270B2 JP 9839375 A JP9839375 A JP 9839375A JP 9839375 A JP9839375 A JP 9839375A JP S5536270 B2 JPS5536270 B2 JP S5536270B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9839375A
Other languages
Japanese (ja)
Other versions
JPS5221223A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9839375A priority Critical patent/JPS5221223A/ja
Publication of JPS5221223A publication Critical patent/JPS5221223A/ja
Publication of JPS5536270B2 publication Critical patent/JPS5536270B2/ja
Granted legal-status Critical Current

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  • ing And Chemical Polishing (AREA)
JP9839375A 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy Granted JPS5221223A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9839375A JPS5221223A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9839375A JPS5221223A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Publications (2)

Publication Number Publication Date
JPS5221223A JPS5221223A (en) 1977-02-17
JPS5536270B2 true JPS5536270B2 ( ) 1980-09-19

Family

ID=14218586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9839375A Granted JPS5221223A (en) 1975-08-13 1975-08-13 Chemical polishing solution for copper and its alloy

Country Status (1)

Country Link
JP (1) JPS5221223A ( )

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5448058U ( ) * 1977-09-09 1979-04-03
JPS63172799A (ja) * 1987-01-12 1988-07-16 日本パ−カライジング株式会社 アルミニウムの表面洗浄剤
FR2621052A1 (fr) * 1987-09-25 1989-03-31 Solvay Bains et procede pour le polissage chimique de surfaces en cuivre ou en alliage de cuivre

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50140333A ( ) * 1974-04-27 1975-11-11

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50140333A ( ) * 1974-04-27 1975-11-11

Also Published As

Publication number Publication date
JPS5221223A (en) 1977-02-17

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