JPS5535010U - - Google Patents

Info

Publication number
JPS5535010U
JPS5535010U JP11694178U JP11694178U JPS5535010U JP S5535010 U JPS5535010 U JP S5535010U JP 11694178 U JP11694178 U JP 11694178U JP 11694178 U JP11694178 U JP 11694178U JP S5535010 U JPS5535010 U JP S5535010U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11694178U
Other languages
Japanese (ja)
Other versions
JPS5652182Y2 (Direct
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978116941U priority Critical patent/JPS5652182Y2/ja
Publication of JPS5535010U publication Critical patent/JPS5535010U/ja
Application granted granted Critical
Publication of JPS5652182Y2 publication Critical patent/JPS5652182Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Special Conveying (AREA)
  • Attitude Control For Articles On Conveyors (AREA)
JP1978116941U 1978-08-26 1978-08-26 Expired JPS5652182Y2 (Direct)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978116941U JPS5652182Y2 (Direct) 1978-08-26 1978-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978116941U JPS5652182Y2 (Direct) 1978-08-26 1978-08-26

Publications (2)

Publication Number Publication Date
JPS5535010U true JPS5535010U (Direct) 1980-03-06
JPS5652182Y2 JPS5652182Y2 (Direct) 1981-12-05

Family

ID=29069933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978116941U Expired JPS5652182Y2 (Direct) 1978-08-26 1978-08-26

Country Status (1)

Country Link
JP (1) JPS5652182Y2 (Direct)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147967A (en) * 1975-06-14 1976-12-18 Fujitsu Ltd Method of controlling spot exposure
JPS53101279A (en) * 1977-02-16 1978-09-04 Jeol Ltd Electron beam exposure device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147967A (en) * 1975-06-14 1976-12-18 Fujitsu Ltd Method of controlling spot exposure
JPS53101279A (en) * 1977-02-16 1978-09-04 Jeol Ltd Electron beam exposure device

Also Published As

Publication number Publication date
JPS5652182Y2 (Direct) 1981-12-05

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