JPS5534666U - - Google Patents
Info
- Publication number
- JPS5534666U JPS5534666U JP1978117690U JP11769078U JPS5534666U JP S5534666 U JPS5534666 U JP S5534666U JP 1978117690 U JP1978117690 U JP 1978117690U JP 11769078 U JP11769078 U JP 11769078U JP S5534666 U JPS5534666 U JP S5534666U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978117690U JPS6125246Y2 (enExample) | 1978-08-30 | 1978-08-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978117690U JPS6125246Y2 (enExample) | 1978-08-30 | 1978-08-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5534666U true JPS5534666U (enExample) | 1980-03-06 |
| JPS6125246Y2 JPS6125246Y2 (enExample) | 1986-07-29 |
Family
ID=29071364
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978117690U Expired JPS6125246Y2 (enExample) | 1978-08-30 | 1978-08-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6125246Y2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6348816A (ja) * | 1986-08-19 | 1988-03-01 | Tokyo Electron Ltd | プラズマ処理装置 |
-
1978
- 1978-08-30 JP JP1978117690U patent/JPS6125246Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6348816A (ja) * | 1986-08-19 | 1988-03-01 | Tokyo Electron Ltd | プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6125246Y2 (enExample) | 1986-07-29 |