JPS5534578B2 - - Google Patents

Info

Publication number
JPS5534578B2
JPS5534578B2 JP11313374A JP11313374A JPS5534578B2 JP S5534578 B2 JPS5534578 B2 JP S5534578B2 JP 11313374 A JP11313374 A JP 11313374A JP 11313374 A JP11313374 A JP 11313374A JP S5534578 B2 JPS5534578 B2 JP S5534578B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11313374A
Other languages
Japanese (ja)
Other versions
JPS5140080A (fr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11313374A priority Critical patent/JPS5534578B2/ja
Publication of JPS5140080A publication Critical patent/JPS5140080A/ja
Publication of JPS5534578B2 publication Critical patent/JPS5534578B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP11313374A 1974-09-30 1974-09-30 Expired JPS5534578B2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11313374A JPS5534578B2 (fr) 1974-09-30 1974-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11313374A JPS5534578B2 (fr) 1974-09-30 1974-09-30

Publications (2)

Publication Number Publication Date
JPS5140080A JPS5140080A (fr) 1976-04-03
JPS5534578B2 true JPS5534578B2 (fr) 1980-09-08

Family

ID=14604372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11313374A Expired JPS5534578B2 (fr) 1974-09-30 1974-09-30

Country Status (1)

Country Link
JP (1) JPS5534578B2 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146185U (fr) * 1980-04-03 1981-11-04
JPS63195188U (fr) * 1987-06-04 1988-12-15
JPH0214711Y2 (fr) * 1984-09-18 1990-04-20
JPH0432552Y2 (fr) * 1987-04-02 1992-08-05

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146185U (fr) * 1980-04-03 1981-11-04
JPH0214711Y2 (fr) * 1984-09-18 1990-04-20
JPH0432552Y2 (fr) * 1987-04-02 1992-08-05
JPS63195188U (fr) * 1987-06-04 1988-12-15

Also Published As

Publication number Publication date
JPS5140080A (fr) 1976-04-03

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