JPS5534578B2 - - Google Patents

Info

Publication number
JPS5534578B2
JPS5534578B2 JP11313374A JP11313374A JPS5534578B2 JP S5534578 B2 JPS5534578 B2 JP S5534578B2 JP 11313374 A JP11313374 A JP 11313374A JP 11313374 A JP11313374 A JP 11313374A JP S5534578 B2 JPS5534578 B2 JP S5534578B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11313374A
Other languages
Japanese (ja)
Other versions
JPS5140080A (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11313374A priority Critical patent/JPS5534578B2/ja
Publication of JPS5140080A publication Critical patent/JPS5140080A/ja
Publication of JPS5534578B2 publication Critical patent/JPS5534578B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP11313374A 1974-09-30 1974-09-30 Expired JPS5534578B2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11313374A JPS5534578B2 (cg-RX-API-DMAC7.html) 1974-09-30 1974-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11313374A JPS5534578B2 (cg-RX-API-DMAC7.html) 1974-09-30 1974-09-30

Publications (2)

Publication Number Publication Date
JPS5140080A JPS5140080A (cg-RX-API-DMAC7.html) 1976-04-03
JPS5534578B2 true JPS5534578B2 (cg-RX-API-DMAC7.html) 1980-09-08

Family

ID=14604372

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11313374A Expired JPS5534578B2 (cg-RX-API-DMAC7.html) 1974-09-30 1974-09-30

Country Status (1)

Country Link
JP (1) JPS5534578B2 (cg-RX-API-DMAC7.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146185U (cg-RX-API-DMAC7.html) * 1980-04-03 1981-11-04
JPS63195188U (cg-RX-API-DMAC7.html) * 1987-06-04 1988-12-15

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146185U (cg-RX-API-DMAC7.html) * 1980-04-03 1981-11-04
JPS63195188U (cg-RX-API-DMAC7.html) * 1987-06-04 1988-12-15

Also Published As

Publication number Publication date
JPS5140080A (cg-RX-API-DMAC7.html) 1976-04-03

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