JPS5534359B2 - - Google Patents

Info

Publication number
JPS5534359B2
JPS5534359B2 JP12502072A JP12502072A JPS5534359B2 JP S5534359 B2 JPS5534359 B2 JP S5534359B2 JP 12502072 A JP12502072 A JP 12502072A JP 12502072 A JP12502072 A JP 12502072A JP S5534359 B2 JPS5534359 B2 JP S5534359B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP12502072A
Other languages
Japanese (ja)
Other versions
JPS4981949A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12502072A priority Critical patent/JPS5534359B2/ja
Publication of JPS4981949A publication Critical patent/JPS4981949A/ja
Publication of JPS5534359B2 publication Critical patent/JPS5534359B2/ja
Expired legal-status Critical Current

Links

JP12502072A 1972-12-12 1972-12-12 Expired JPS5534359B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12502072A JPS5534359B2 (en) 1972-12-12 1972-12-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12502072A JPS5534359B2 (en) 1972-12-12 1972-12-12

Publications (2)

Publication Number Publication Date
JPS4981949A JPS4981949A (en) 1974-08-07
JPS5534359B2 true JPS5534359B2 (en) 1980-09-05

Family

ID=14899858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12502072A Expired JPS5534359B2 (en) 1972-12-12 1972-12-12

Country Status (1)

Country Link
JP (1) JPS5534359B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254632B2 (en) * 1982-01-29 1990-11-22 Kel Kk
JP2019048298A (en) * 2018-11-30 2019-03-28 株式会社Screenホールディングス Substrate processing apparatus and pipe washing method in substrate processing apparatus

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5836280B2 (en) * 1976-11-08 1983-08-08 日本鋼管株式会社 Water treatment method for heat exchanger for sintering exhaust gas treatment
JPS5842799Y2 (en) * 1977-12-19 1983-09-28 高砂熱学工業株式会社 Coil antifreeze treatment equipment
JPS5873391U (en) * 1981-11-13 1983-05-18 横河電機株式会社 Impulse pipe cleaning device
JPS58194396U (en) * 1982-06-18 1983-12-24 岩井機械工業株式会社 Damage inspection device for heat transfer plates in plate heat exchangers
JPS63281992A (en) * 1987-05-14 1988-11-18 株式会社 インダック Method and device for washing beer sediment
JPH05215491A (en) * 1992-02-05 1993-08-24 Kubota Corp Heat exchanger for water heat source
JP5583245B2 (en) * 2013-06-24 2014-09-03 株式会社東芝 Equipment for decontamination of nuclear power plant facilities

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215822A (en) * 1975-07-29 1977-02-05 Ishihara Sangyo Kaisha Ltd Herbicide

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5215822A (en) * 1975-07-29 1977-02-05 Ishihara Sangyo Kaisha Ltd Herbicide

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0254632B2 (en) * 1982-01-29 1990-11-22 Kel Kk
JP2019048298A (en) * 2018-11-30 2019-03-28 株式会社Screenホールディングス Substrate processing apparatus and pipe washing method in substrate processing apparatus

Also Published As

Publication number Publication date
JPS4981949A (en) 1974-08-07

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