JPS5533919B2 - - Google Patents

Info

Publication number
JPS5533919B2
JPS5533919B2 JP1530373A JP1530373A JPS5533919B2 JP S5533919 B2 JPS5533919 B2 JP S5533919B2 JP 1530373 A JP1530373 A JP 1530373A JP 1530373 A JP1530373 A JP 1530373A JP S5533919 B2 JPS5533919 B2 JP S5533919B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1530373A
Other languages
Japanese (ja)
Other versions
JPS49103474A (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1530373A priority Critical patent/JPS5533919B2/ja
Publication of JPS49103474A publication Critical patent/JPS49103474A/ja
Publication of JPS5533919B2 publication Critical patent/JPS5533919B2/ja
Expired legal-status Critical Current

Links

JP1530373A 1973-02-07 1973-02-07 Expired JPS5533919B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1530373A JPS5533919B2 (ko) 1973-02-07 1973-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1530373A JPS5533919B2 (ko) 1973-02-07 1973-02-07

Publications (2)

Publication Number Publication Date
JPS49103474A JPS49103474A (ko) 1974-09-30
JPS5533919B2 true JPS5533919B2 (ko) 1980-09-03

Family

ID=11885029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1530373A Expired JPS5533919B2 (ko) 1973-02-07 1973-02-07

Country Status (1)

Country Link
JP (1) JPS5533919B2 (ko)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956578A (ja) * 1982-09-27 1984-04-02 Tanaka Kikinzoku Kogyo Kk イオンプレ−テイング方法
JPS60100668A (ja) * 1983-11-02 1985-06-04 Mitsubishi Electric Corp 化合物薄膜製造装置
JPS60100669A (ja) * 1983-11-02 1985-06-04 Mitsubishi Electric Corp 化合物薄膜製造装置
JPH0153351B2 (ko) * 1983-09-28 1989-11-14 Ricoh Kk

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5956578A (ja) * 1982-09-27 1984-04-02 Tanaka Kikinzoku Kogyo Kk イオンプレ−テイング方法
JPH0153351B2 (ko) * 1983-09-28 1989-11-14 Ricoh Kk
JPS60100668A (ja) * 1983-11-02 1985-06-04 Mitsubishi Electric Corp 化合物薄膜製造装置
JPS60100669A (ja) * 1983-11-02 1985-06-04 Mitsubishi Electric Corp 化合物薄膜製造装置

Also Published As

Publication number Publication date
JPS49103474A (ko) 1974-09-30

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