JPS5533679B2 - - Google Patents
Info
- Publication number
- JPS5533679B2 JPS5533679B2 JP10338876A JP10338876A JPS5533679B2 JP S5533679 B2 JPS5533679 B2 JP S5533679B2 JP 10338876 A JP10338876 A JP 10338876A JP 10338876 A JP10338876 A JP 10338876A JP S5533679 B2 JPS5533679 B2 JP S5533679B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10338876A JPS5328579A (en) | 1976-08-30 | 1976-08-30 | Removing agents of scale |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10338876A JPS5328579A (en) | 1976-08-30 | 1976-08-30 | Removing agents of scale |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5328579A JPS5328579A (en) | 1978-03-16 |
| JPS5533679B2 true JPS5533679B2 (en) | 1980-09-02 |
Family
ID=14352683
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10338876A Granted JPS5328579A (en) | 1976-08-30 | 1976-08-30 | Removing agents of scale |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5328579A (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5753204A (en) * | 1980-09-16 | 1982-03-30 | Daicel Chem Ind Ltd | Method for washing membrane module |
| US6593282B1 (en) | 1997-10-21 | 2003-07-15 | Lam Research Corporation | Cleaning solutions for semiconductor substrates after polishing of copper film |
| US6303551B1 (en) | 1997-10-21 | 2001-10-16 | Lam Research Corporation | Cleaning solution and method for cleaning semiconductor substrates after polishing of cooper film |
| US6479443B1 (en) | 1997-10-21 | 2002-11-12 | Lam Research Corporation | Cleaning solution and method for cleaning semiconductor substrates after polishing of copper film |
| US6165956A (en) * | 1997-10-21 | 2000-12-26 | Lam Research Corporation | Methods and apparatus for cleaning semiconductor substrates after polishing of copper film |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4939736A (en) * | 1972-08-29 | 1974-04-13 | ||
| JPS4947606A (en) * | 1972-09-09 | 1974-05-08 | ||
| JPS5085587A (en) * | 1973-12-03 | 1975-07-10 |
-
1976
- 1976-08-30 JP JP10338876A patent/JPS5328579A/en active Granted
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4939736A (en) * | 1972-08-29 | 1974-04-13 | ||
| JPS4947606A (en) * | 1972-09-09 | 1974-05-08 | ||
| JPS5085587A (en) * | 1973-12-03 | 1975-07-10 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5328579A (en) | 1978-03-16 |