JPS5533644Y2 - - Google Patents
Info
- Publication number
- JPS5533644Y2 JPS5533644Y2 JP4021476U JP4021476U JPS5533644Y2 JP S5533644 Y2 JPS5533644 Y2 JP S5533644Y2 JP 4021476 U JP4021476 U JP 4021476U JP 4021476 U JP4021476 U JP 4021476U JP S5533644 Y2 JPS5533644 Y2 JP S5533644Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4021476U JPS5533644Y2 (en:Method) | 1976-03-31 | 1976-03-31 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4021476U JPS5533644Y2 (en:Method) | 1976-03-31 | 1976-03-31 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52131960U JPS52131960U (en:Method) | 1977-10-06 |
| JPS5533644Y2 true JPS5533644Y2 (en:Method) | 1980-08-09 |
Family
ID=28499368
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4021476U Expired JPS5533644Y2 (en:Method) | 1976-03-31 | 1976-03-31 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5533644Y2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54158872A (en) * | 1978-06-06 | 1979-12-15 | Jeol Ltd | Sampler of electron-beam exposure unit or the like |
| JPH0217476Y2 (en:Method) * | 1981-01-23 | 1990-05-16 |
-
1976
- 1976-03-31 JP JP4021476U patent/JPS5533644Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52131960U (en:Method) | 1977-10-06 |