JPS5533644Y2 - - Google Patents

Info

Publication number
JPS5533644Y2
JPS5533644Y2 JP4021476U JP4021476U JPS5533644Y2 JP S5533644 Y2 JPS5533644 Y2 JP S5533644Y2 JP 4021476 U JP4021476 U JP 4021476U JP 4021476 U JP4021476 U JP 4021476U JP S5533644 Y2 JPS5533644 Y2 JP S5533644Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4021476U
Other languages
Japanese (ja)
Other versions
JPS52131960U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4021476U priority Critical patent/JPS5533644Y2/ja
Publication of JPS52131960U publication Critical patent/JPS52131960U/ja
Application granted granted Critical
Publication of JPS5533644Y2 publication Critical patent/JPS5533644Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Electron Beam Exposure (AREA)
JP4021476U 1976-03-31 1976-03-31 Expired JPS5533644Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4021476U JPS5533644Y2 (enrdf_load_stackoverflow) 1976-03-31 1976-03-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4021476U JPS5533644Y2 (enrdf_load_stackoverflow) 1976-03-31 1976-03-31

Publications (2)

Publication Number Publication Date
JPS52131960U JPS52131960U (enrdf_load_stackoverflow) 1977-10-06
JPS5533644Y2 true JPS5533644Y2 (enrdf_load_stackoverflow) 1980-08-09

Family

ID=28499368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4021476U Expired JPS5533644Y2 (enrdf_load_stackoverflow) 1976-03-31 1976-03-31

Country Status (1)

Country Link
JP (1) JPS5533644Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54158872A (en) * 1978-06-06 1979-12-15 Jeol Ltd Sampler of electron-beam exposure unit or the like
JPH0217476Y2 (enrdf_load_stackoverflow) * 1981-01-23 1990-05-16

Also Published As

Publication number Publication date
JPS52131960U (enrdf_load_stackoverflow) 1977-10-06

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