JPS5533587B2 - - Google Patents
Info
- Publication number
- JPS5533587B2 JPS5533587B2 JP8878672A JP8878672A JPS5533587B2 JP S5533587 B2 JPS5533587 B2 JP S5533587B2 JP 8878672 A JP8878672 A JP 8878672A JP 8878672 A JP8878672 A JP 8878672A JP S5533587 B2 JPS5533587 B2 JP S5533587B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8878672A JPS5533587B2 (https=) | 1972-09-06 | 1972-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8878672A JPS5533587B2 (https=) | 1972-09-06 | 1972-09-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4946996A JPS4946996A (https=) | 1974-05-07 |
| JPS5533587B2 true JPS5533587B2 (https=) | 1980-09-01 |
Family
ID=13952516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8878672A Expired JPS5533587B2 (https=) | 1972-09-06 | 1972-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5533587B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6770888B1 (en) * | 2003-05-15 | 2004-08-03 | Axcelis Technologies, Inc. | High mass resolution magnet for ribbon beam ion implanters |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5136638A (ja) * | 1974-09-24 | 1976-03-27 | Dowa Co | Netsudentsuitojukikabaana |
-
1972
- 1972-09-06 JP JP8878672A patent/JPS5533587B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4946996A (https=) | 1974-05-07 |