JPS5533587B2 - - Google Patents

Info

Publication number
JPS5533587B2
JPS5533587B2 JP8878672A JP8878672A JPS5533587B2 JP S5533587 B2 JPS5533587 B2 JP S5533587B2 JP 8878672 A JP8878672 A JP 8878672A JP 8878672 A JP8878672 A JP 8878672A JP S5533587 B2 JPS5533587 B2 JP S5533587B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8878672A
Other languages
Japanese (ja)
Other versions
JPS4946996A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8878672A priority Critical patent/JPS5533587B2/ja
Publication of JPS4946996A publication Critical patent/JPS4946996A/ja
Publication of JPS5533587B2 publication Critical patent/JPS5533587B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP8878672A 1972-09-06 1972-09-06 Expired JPS5533587B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8878672A JPS5533587B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-06 1972-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8878672A JPS5533587B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-06 1972-09-06

Publications (2)

Publication Number Publication Date
JPS4946996A JPS4946996A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-07
JPS5533587B2 true JPS5533587B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-09-01

Family

ID=13952516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8878672A Expired JPS5533587B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1972-09-06 1972-09-06

Country Status (1)

Country Link
JP (1) JPS5533587B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6770888B1 (en) * 2003-05-15 2004-08-03 Axcelis Technologies, Inc. High mass resolution magnet for ribbon beam ion implanters

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136638A (ja) * 1974-09-24 1976-03-27 Dowa Co Netsudentsuitojukikabaana

Also Published As

Publication number Publication date
JPS4946996A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-07

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