JPS5533584B2 - - Google Patents
Info
- Publication number
- JPS5533584B2 JPS5533584B2 JP841674A JP841674A JPS5533584B2 JP S5533584 B2 JPS5533584 B2 JP S5533584B2 JP 841674 A JP841674 A JP 841674A JP 841674 A JP841674 A JP 841674A JP S5533584 B2 JPS5533584 B2 JP S5533584B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP841674A JPS5533584B2 (zh) | 1974-01-17 | 1974-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP841674A JPS5533584B2 (zh) | 1974-01-17 | 1974-01-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5047562A JPS5047562A (zh) | 1975-04-28 |
| JPS5533584B2 true JPS5533584B2 (zh) | 1980-09-01 |
Family
ID=11692519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP841674A Expired JPS5533584B2 (zh) | 1974-01-17 | 1974-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5533584B2 (zh) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10840055B2 (en) * | 2018-03-20 | 2020-11-17 | Kla Corporation | System and method for photocathode illumination inspection |
-
1974
- 1974-01-17 JP JP841674A patent/JPS5533584B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5047562A (zh) | 1975-04-28 |