JPS5532607B2 - - Google Patents
Info
- Publication number
- JPS5532607B2 JPS5532607B2 JP4272376A JP4272376A JPS5532607B2 JP S5532607 B2 JPS5532607 B2 JP S5532607B2 JP 4272376 A JP4272376 A JP 4272376A JP 4272376 A JP4272376 A JP 4272376A JP S5532607 B2 JPS5532607 B2 JP S5532607B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Discharge Of Articles From Conveyors (AREA)
- Control Of Conveyors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4272376A JPS52126862A (en) | 1976-04-15 | 1976-04-15 | Monitor and control system for conveying line |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4272376A JPS52126862A (en) | 1976-04-15 | 1976-04-15 | Monitor and control system for conveying line |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS52126862A JPS52126862A (en) | 1977-10-25 |
JPS5532607B2 true JPS5532607B2 (ko) | 1980-08-26 |
Family
ID=12643977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4272376A Granted JPS52126862A (en) | 1976-04-15 | 1976-04-15 | Monitor and control system for conveying line |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS52126862A (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0693477B2 (ja) * | 1986-10-20 | 1994-11-16 | 東京エレクトロン株式会社 | イオン注入装置 |
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1976
- 1976-04-15 JP JP4272376A patent/JPS52126862A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS52126862A (en) | 1977-10-25 |