JPS5532236B2 - - Google Patents

Info

Publication number
JPS5532236B2
JPS5532236B2 JP4601277A JP4601277A JPS5532236B2 JP S5532236 B2 JPS5532236 B2 JP S5532236B2 JP 4601277 A JP4601277 A JP 4601277A JP 4601277 A JP4601277 A JP 4601277A JP S5532236 B2 JPS5532236 B2 JP S5532236B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4601277A
Other languages
Japanese (ja)
Other versions
JPS53131764A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4601277A priority Critical patent/JPS53131764A/en
Publication of JPS53131764A publication Critical patent/JPS53131764A/en
Publication of JPS5532236B2 publication Critical patent/JPS5532236B2/ja
Granted legal-status Critical Current

Links

JP4601277A 1977-04-21 1977-04-21 Method of producing compound semiconductor Granted JPS53131764A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4601277A JPS53131764A (en) 1977-04-21 1977-04-21 Method of producing compound semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4601277A JPS53131764A (en) 1977-04-21 1977-04-21 Method of producing compound semiconductor

Publications (2)

Publication Number Publication Date
JPS53131764A JPS53131764A (en) 1978-11-16
JPS5532236B2 true JPS5532236B2 (en) 1980-08-23

Family

ID=12735138

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4601277A Granted JPS53131764A (en) 1977-04-21 1977-04-21 Method of producing compound semiconductor

Country Status (1)

Country Link
JP (1) JPS53131764A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5696834A (en) * 1979-12-28 1981-08-05 Mitsubishi Monsanto Chem Co Compound semiconductor epitaxial wafer and manufacture thereof
JPH0719747B2 (en) * 1984-01-13 1995-03-06 信越半導体株式会社 Epitaxy wafer
JPS60187013A (en) * 1984-03-06 1985-09-24 Shin Etsu Handotai Co Ltd Epitaxial wafer
JPH079883B2 (en) * 1984-03-28 1995-02-01 信越半導体株式会社 Method of manufacturing epitaxial wafer
JPS60214524A (en) * 1984-04-10 1985-10-26 Shin Etsu Handotai Co Ltd Growing method of gallium phosphide arsenide epitaxial film

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313376A (en) * 1976-07-22 1978-02-06 Toshiba Corp Semiconductor element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5313376A (en) * 1976-07-22 1978-02-06 Toshiba Corp Semiconductor element

Also Published As

Publication number Publication date
JPS53131764A (en) 1978-11-16

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