JPS5532236B2 - - Google Patents
Info
- Publication number
- JPS5532236B2 JPS5532236B2 JP4601277A JP4601277A JPS5532236B2 JP S5532236 B2 JPS5532236 B2 JP S5532236B2 JP 4601277 A JP4601277 A JP 4601277A JP 4601277 A JP4601277 A JP 4601277A JP S5532236 B2 JPS5532236 B2 JP S5532236B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4601277A JPS53131764A (en) | 1977-04-21 | 1977-04-21 | Method of producing compound semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4601277A JPS53131764A (en) | 1977-04-21 | 1977-04-21 | Method of producing compound semiconductor |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53131764A JPS53131764A (en) | 1978-11-16 |
JPS5532236B2 true JPS5532236B2 (en) | 1980-08-23 |
Family
ID=12735138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4601277A Granted JPS53131764A (en) | 1977-04-21 | 1977-04-21 | Method of producing compound semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53131764A (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5696834A (en) * | 1979-12-28 | 1981-08-05 | Mitsubishi Monsanto Chem Co | Compound semiconductor epitaxial wafer and manufacture thereof |
JPH0719747B2 (en) * | 1984-01-13 | 1995-03-06 | 信越半導体株式会社 | Epitaxy wafer |
JPS60187013A (en) * | 1984-03-06 | 1985-09-24 | Shin Etsu Handotai Co Ltd | Epitaxial wafer |
JPH079883B2 (en) * | 1984-03-28 | 1995-02-01 | 信越半導体株式会社 | Method of manufacturing epitaxial wafer |
JPS60214524A (en) * | 1984-04-10 | 1985-10-26 | Shin Etsu Handotai Co Ltd | Growing method of gallium phosphide arsenide epitaxial film |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5313376A (en) * | 1976-07-22 | 1978-02-06 | Toshiba Corp | Semiconductor element |
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1977
- 1977-04-21 JP JP4601277A patent/JPS53131764A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5313376A (en) * | 1976-07-22 | 1978-02-06 | Toshiba Corp | Semiconductor element |
Also Published As
Publication number | Publication date |
---|---|
JPS53131764A (en) | 1978-11-16 |