JPS5532018B2 - - Google Patents
Info
- Publication number
- JPS5532018B2 JPS5532018B2 JP79573A JP79573A JPS5532018B2 JP S5532018 B2 JPS5532018 B2 JP S5532018B2 JP 79573 A JP79573 A JP 79573A JP 79573 A JP79573 A JP 79573A JP S5532018 B2 JPS5532018 B2 JP S5532018B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP79573A JPS5532018B2 (el) | 1972-12-25 | 1972-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP79573A JPS5532018B2 (el) | 1972-12-25 | 1972-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4988481A JPS4988481A (el) | 1974-08-23 |
| JPS5532018B2 true JPS5532018B2 (el) | 1980-08-22 |
Family
ID=11483602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP79573A Expired JPS5532018B2 (el) | 1972-12-25 | 1972-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5532018B2 (el) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2710268B2 (ja) * | 1994-08-23 | 1998-02-10 | 工業技術院長 | 局所エッチング方法 |
-
1972
- 1972-12-25 JP JP79573A patent/JPS5532018B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4988481A (el) | 1974-08-23 |