JPS5531813Y2 - - Google Patents
Info
- Publication number
- JPS5531813Y2 JPS5531813Y2 JP9563975U JP9563975U JPS5531813Y2 JP S5531813 Y2 JPS5531813 Y2 JP S5531813Y2 JP 9563975 U JP9563975 U JP 9563975U JP 9563975 U JP9563975 U JP 9563975U JP S5531813 Y2 JPS5531813 Y2 JP S5531813Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9563975U JPS5531813Y2 (de) | 1975-07-11 | 1975-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9563975U JPS5531813Y2 (de) | 1975-07-11 | 1975-07-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5211049U JPS5211049U (de) | 1977-01-26 |
| JPS5531813Y2 true JPS5531813Y2 (de) | 1980-07-29 |
Family
ID=28577417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9563975U Expired JPS5531813Y2 (de) | 1975-07-11 | 1975-07-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5531813Y2 (de) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3011866B2 (ja) * | 1994-11-30 | 2000-02-21 | 信越石英株式会社 | 枚葉式ウエーハ熱処理装置 |
-
1975
- 1975-07-11 JP JP9563975U patent/JPS5531813Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5211049U (de) | 1977-01-26 |