JPS5531813Y2 - - Google Patents

Info

Publication number
JPS5531813Y2
JPS5531813Y2 JP9563975U JP9563975U JPS5531813Y2 JP S5531813 Y2 JPS5531813 Y2 JP S5531813Y2 JP 9563975 U JP9563975 U JP 9563975U JP 9563975 U JP9563975 U JP 9563975U JP S5531813 Y2 JPS5531813 Y2 JP S5531813Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9563975U
Other languages
Japanese (ja)
Other versions
JPS5211049U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9563975U priority Critical patent/JPS5531813Y2/ja
Publication of JPS5211049U publication Critical patent/JPS5211049U/ja
Application granted granted Critical
Publication of JPS5531813Y2 publication Critical patent/JPS5531813Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP9563975U 1975-07-11 1975-07-11 Expired JPS5531813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9563975U JPS5531813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-11 1975-07-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9563975U JPS5531813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-11 1975-07-11

Publications (2)

Publication Number Publication Date
JPS5211049U JPS5211049U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-01-26
JPS5531813Y2 true JPS5531813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-07-29

Family

ID=28577417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9563975U Expired JPS5531813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-11 1975-07-11

Country Status (1)

Country Link
JP (1) JPS5531813Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3011866B2 (ja) * 1994-11-30 2000-02-21 信越石英株式会社 枚葉式ウエーハ熱処理装置

Also Published As

Publication number Publication date
JPS5211049U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1977-01-26

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