JPS553151Y2 - - Google Patents
Info
- Publication number
- JPS553151Y2 JPS553151Y2 JP2152675U JP2152675U JPS553151Y2 JP S553151 Y2 JPS553151 Y2 JP S553151Y2 JP 2152675 U JP2152675 U JP 2152675U JP 2152675 U JP2152675 U JP 2152675U JP S553151 Y2 JPS553151 Y2 JP S553151Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Stacking Of Articles And Auxiliary Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2152675U JPS553151Y2 (is") | 1975-02-18 | 1975-02-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2152675U JPS553151Y2 (is") | 1975-02-18 | 1975-02-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51103449U JPS51103449U (is") | 1976-08-19 |
| JPS553151Y2 true JPS553151Y2 (is") | 1980-01-25 |
Family
ID=28113068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2152675U Expired JPS553151Y2 (is") | 1975-02-18 | 1975-02-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS553151Y2 (is") |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10293088A (ja) * | 1997-04-18 | 1998-11-04 | Fujimori Gijutsu Kenkyusho:Kk | 基板表面検査装置 |
-
1975
- 1975-02-18 JP JP2152675U patent/JPS553151Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10293088A (ja) * | 1997-04-18 | 1998-11-04 | Fujimori Gijutsu Kenkyusho:Kk | 基板表面検査装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51103449U (is") | 1976-08-19 |