JPS5531113Y2 - - Google Patents
Info
- Publication number
- JPS5531113Y2 JPS5531113Y2 JP13633175U JP13633175U JPS5531113Y2 JP S5531113 Y2 JPS5531113 Y2 JP S5531113Y2 JP 13633175 U JP13633175 U JP 13633175U JP 13633175 U JP13633175 U JP 13633175U JP S5531113 Y2 JPS5531113 Y2 JP S5531113Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Excavating Of Shafts Or Tunnels (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13633175U JPS5531113Y2 (en:Method) | 1975-10-07 | 1975-10-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13633175U JPS5531113Y2 (en:Method) | 1975-10-07 | 1975-10-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5249504U JPS5249504U (en:Method) | 1977-04-08 |
| JPS5531113Y2 true JPS5531113Y2 (en:Method) | 1980-07-24 |
Family
ID=28616325
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13633175U Expired JPS5531113Y2 (en:Method) | 1975-10-07 | 1975-10-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5531113Y2 (en:Method) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55154736A (en) * | 1979-05-23 | 1980-12-02 | Sigma Gijutsu Kogyo Kk | Centrifugal drier |
| JPS6218034Y2 (en:Method) * | 1981-01-27 | 1987-05-09 | ||
| JPS60125727U (ja) * | 1984-02-02 | 1985-08-24 | 黒谷 巌 | 半導体材料のキヤリヤ用クレイドル |
| JPS60192438U (ja) * | 1984-05-31 | 1985-12-20 | エフ・エス・アイジヤパン株式会社 | 半導体用ウエハ−洗浄装置におけるグレ−ドル |
-
1975
- 1975-10-07 JP JP13633175U patent/JPS5531113Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5249504U (en:Method) | 1977-04-08 |