JPS5530656B2 - - Google Patents

Info

Publication number
JPS5530656B2
JPS5530656B2 JP5169574A JP5169574A JPS5530656B2 JP S5530656 B2 JPS5530656 B2 JP S5530656B2 JP 5169574 A JP5169574 A JP 5169574A JP 5169574 A JP5169574 A JP 5169574A JP S5530656 B2 JPS5530656 B2 JP S5530656B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5169574A
Other languages
Japanese (ja)
Other versions
JPS5099677A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5099677A publication Critical patent/JPS5099677A/ja
Publication of JPS5530656B2 publication Critical patent/JPS5530656B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02—Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/10—Screens on or from which an image or pattern is formed, picked up, converted or stored
    • H01J29/36—Photoelectric screens; Charge-storage screens
    • H01J29/39—Charge-storage screens

Landscapes

  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Semiconductor Memories (AREA)
  • Apparatus For Radiation Diagnosis (AREA)
JP5169574A 1974-01-02 1974-05-09 Expired JPS5530656B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US43025774A 1974-01-02 1974-01-02

Publications (2)

Publication Number Publication Date
JPS5099677A JPS5099677A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-08-07
JPS5530656B2 true JPS5530656B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-08-12

Family

ID=23706754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5169574A Expired JPS5530656B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-01-02 1974-05-09

Country Status (7)

Country Link
JP (1) JPS5530656B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CA (1) CA1044744A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE2420789C3 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
FR (1) FR2256529B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
GB (1) GB1478594A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
IT (1) IT1021128B (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
NL (1) NL7407172A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190077633A (ko) * 2014-12-01 2019-07-03 에이에스엠엘 네델란즈 비.브이. 리소그래피 제조 프로세스에 관련된 진단 정보를 획득하기 위한 방법 및 장치, 진단 장치를 포함하는 리소그래피 처리 시스템

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4849378A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1971-10-22 1973-07-12
JPS49118366A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1973-03-10 1974-11-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190077633A (ko) * 2014-12-01 2019-07-03 에이에스엠엘 네델란즈 비.브이. 리소그래피 제조 프로세스에 관련된 진단 정보를 획득하기 위한 방법 및 장치, 진단 장치를 포함하는 리소그래피 처리 시스템

Also Published As

Publication number Publication date
IT1021128B (it) 1978-01-30
CA1044744A (en) 1978-12-19
GB1478594A (en) 1977-07-06
NL7407172A (nl) 1975-07-04
FR2256529B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-01-26
DE2420789B2 (de) 1979-12-06
FR2256529A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-07-25
DE2420789A1 (de) 1975-07-10
JPS5099677A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-08-07
DE2420789C3 (de) 1980-08-21

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