JPS5530651B2 - - Google Patents

Info

Publication number
JPS5530651B2
JPS5530651B2 JP7798775A JP7798775A JPS5530651B2 JP S5530651 B2 JPS5530651 B2 JP S5530651B2 JP 7798775 A JP7798775 A JP 7798775A JP 7798775 A JP7798775 A JP 7798775A JP S5530651 B2 JPS5530651 B2 JP S5530651B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7798775A
Other languages
Japanese (ja)
Other versions
JPS522381A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50077987A priority Critical patent/JPS522381A/ja
Publication of JPS522381A publication Critical patent/JPS522381A/ja
Publication of JPS5530651B2 publication Critical patent/JPS5530651B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP50077987A 1975-06-24 1975-06-24 Electronics beam deflection scanning method Granted JPS522381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50077987A JPS522381A (en) 1975-06-24 1975-06-24 Electronics beam deflection scanning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50077987A JPS522381A (en) 1975-06-24 1975-06-24 Electronics beam deflection scanning method

Publications (2)

Publication Number Publication Date
JPS522381A JPS522381A (en) 1977-01-10
JPS5530651B2 true JPS5530651B2 (enExample) 1980-08-12

Family

ID=13649192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50077987A Granted JPS522381A (en) 1975-06-24 1975-06-24 Electronics beam deflection scanning method

Country Status (1)

Country Link
JP (1) JPS522381A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5435173U (enExample) * 1977-08-12 1979-03-07
JPS54130448A (en) * 1978-03-31 1979-10-09 Umebachi Fuasunaa Kk Method and apparatus for phosphate treatment of eleongated material

Also Published As

Publication number Publication date
JPS522381A (en) 1977-01-10

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