JPS5530297B2 - - Google Patents
Info
- Publication number
- JPS5530297B2 JPS5530297B2 JP15306475A JP15306475A JPS5530297B2 JP S5530297 B2 JPS5530297 B2 JP S5530297B2 JP 15306475 A JP15306475 A JP 15306475A JP 15306475 A JP15306475 A JP 15306475A JP S5530297 B2 JPS5530297 B2 JP S5530297B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Formation Of Insulating Films (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15306475A JPS5276881A (en) | 1975-12-22 | 1975-12-22 | Formation of mask by nitride silicon film in production process of sem iconductor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15306475A JPS5276881A (en) | 1975-12-22 | 1975-12-22 | Formation of mask by nitride silicon film in production process of sem iconductor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5276881A JPS5276881A (en) | 1977-06-28 |
| JPS5530297B2 true JPS5530297B2 (pt) | 1980-08-09 |
Family
ID=15554184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15306475A Granted JPS5276881A (en) | 1975-12-22 | 1975-12-22 | Formation of mask by nitride silicon film in production process of sem iconductor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5276881A (pt) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6068036U (ja) * | 1983-10-18 | 1985-05-14 | 康 文太郎 | 流体の注入口 |
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1975
- 1975-12-22 JP JP15306475A patent/JPS5276881A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6068036U (ja) * | 1983-10-18 | 1985-05-14 | 康 文太郎 | 流体の注入口 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5276881A (en) | 1977-06-28 |