JPS5530293B2 - - Google Patents
Info
- Publication number
- JPS5530293B2 JPS5530293B2 JP11837475A JP11837475A JPS5530293B2 JP S5530293 B2 JPS5530293 B2 JP S5530293B2 JP 11837475 A JP11837475 A JP 11837475A JP 11837475 A JP11837475 A JP 11837475A JP S5530293 B2 JPS5530293 B2 JP S5530293B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50118374A JPS5242375A (en) | 1975-09-30 | 1975-09-30 | Process for production of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50118374A JPS5242375A (en) | 1975-09-30 | 1975-09-30 | Process for production of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5242375A JPS5242375A (en) | 1977-04-01 |
| JPS5530293B2 true JPS5530293B2 (en:Method) | 1980-08-09 |
Family
ID=14735111
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50118374A Granted JPS5242375A (en) | 1975-09-30 | 1975-09-30 | Process for production of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5242375A (en:Method) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ATE449418T1 (de) * | 2005-12-23 | 2009-12-15 | Imec | Methode für ein selektives epitaktisches wachstum von source/drain gebieten |
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1975
- 1975-09-30 JP JP50118374A patent/JPS5242375A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5242375A (en) | 1977-04-01 |