JPS5530292B2 - - Google Patents
Info
- Publication number
- JPS5530292B2 JPS5530292B2 JP11773475A JP11773475A JPS5530292B2 JP S5530292 B2 JPS5530292 B2 JP S5530292B2 JP 11773475 A JP11773475 A JP 11773475A JP 11773475 A JP11773475 A JP 11773475A JP S5530292 B2 JPS5530292 B2 JP S5530292B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Element Separation (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11773475A JPS5243369A (en) | 1975-10-01 | 1975-10-01 | Flat etching method for silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11773475A JPS5243369A (en) | 1975-10-01 | 1975-10-01 | Flat etching method for silicon |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5243369A JPS5243369A (en) | 1977-04-05 |
| JPS5530292B2 true JPS5530292B2 (no) | 1980-08-09 |
Family
ID=14718954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11773475A Granted JPS5243369A (en) | 1975-10-01 | 1975-10-01 | Flat etching method for silicon |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5243369A (no) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4278987A (en) * | 1977-10-17 | 1981-07-14 | Hitachi, Ltd. | Junction isolated IC with thick EPI portion having sides at least 20 degrees from (110) orientations |
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1975
- 1975-10-01 JP JP11773475A patent/JPS5243369A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5243369A (en) | 1977-04-05 |