JPS5529238Y2 - - Google Patents
Info
- Publication number
- JPS5529238Y2 JPS5529238Y2 JP10107275U JP10107275U JPS5529238Y2 JP S5529238 Y2 JPS5529238 Y2 JP S5529238Y2 JP 10107275 U JP10107275 U JP 10107275U JP 10107275 U JP10107275 U JP 10107275U JP S5529238 Y2 JPS5529238 Y2 JP S5529238Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10107275U JPS5529238Y2 (en:Method) | 1975-07-21 | 1975-07-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10107275U JPS5529238Y2 (en:Method) | 1975-07-21 | 1975-07-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5215169U JPS5215169U (en:Method) | 1977-02-02 |
| JPS5529238Y2 true JPS5529238Y2 (en:Method) | 1980-07-11 |
Family
ID=28582588
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10107275U Expired JPS5529238Y2 (en:Method) | 1975-07-21 | 1975-07-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5529238Y2 (en:Method) |
-
1975
- 1975-07-21 JP JP10107275U patent/JPS5529238Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5215169U (en:Method) | 1977-02-02 |