JPS552892B2 - - Google Patents

Info

Publication number
JPS552892B2
JPS552892B2 JP5874676A JP5874676A JPS552892B2 JP S552892 B2 JPS552892 B2 JP S552892B2 JP 5874676 A JP5874676 A JP 5874676A JP 5874676 A JP5874676 A JP 5874676A JP S552892 B2 JPS552892 B2 JP S552892B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5874676A
Other languages
Japanese (ja)
Other versions
JPS52142475A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5874676A priority Critical patent/JPS52142475A/ja
Publication of JPS52142475A publication Critical patent/JPS52142475A/ja
Publication of JPS552892B2 publication Critical patent/JPS552892B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Led Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP5874676A 1976-05-21 1976-05-21 Liquiddgrowth method Granted JPS52142475A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5874676A JPS52142475A (en) 1976-05-21 1976-05-21 Liquiddgrowth method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5874676A JPS52142475A (en) 1976-05-21 1976-05-21 Liquiddgrowth method

Publications (2)

Publication Number Publication Date
JPS52142475A JPS52142475A (en) 1977-11-28
JPS552892B2 true JPS552892B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1980-01-22

Family

ID=13093090

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5874676A Granted JPS52142475A (en) 1976-05-21 1976-05-21 Liquiddgrowth method

Country Status (1)

Country Link
JP (1) JPS52142475A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3747562A (en) * 1971-05-28 1973-07-24 Texas Instruments Inc Sliding furnace boat apparatus
JPS5132529B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-06-14 1976-09-13
US3890194A (en) * 1974-04-11 1975-06-17 Rca Corp Method for depositing on a substrate a plurality of epitaxial layers in succession

Also Published As

Publication number Publication date
JPS52142475A (en) 1977-11-28

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