JPS552891B2 - - Google Patents
Info
- Publication number
- JPS552891B2 JPS552891B2 JP3797276A JP3797276A JPS552891B2 JP S552891 B2 JPS552891 B2 JP S552891B2 JP 3797276 A JP3797276 A JP 3797276A JP 3797276 A JP3797276 A JP 3797276A JP S552891 B2 JPS552891 B2 JP S552891B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Led Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3797276A JPS52120765A (en) | 1976-04-05 | 1976-04-05 | Liquid-phase epitaxial growing boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3797276A JPS52120765A (en) | 1976-04-05 | 1976-04-05 | Liquid-phase epitaxial growing boat |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52120765A JPS52120765A (en) | 1977-10-11 |
| JPS552891B2 true JPS552891B2 (cs) | 1980-01-22 |
Family
ID=12512466
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3797276A Granted JPS52120765A (en) | 1976-04-05 | 1976-04-05 | Liquid-phase epitaxial growing boat |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52120765A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61270818A (ja) * | 1985-05-25 | 1986-12-01 | Mitsubishi Electric Corp | 液相エピタキシヤル成長装置 |
-
1976
- 1976-04-05 JP JP3797276A patent/JPS52120765A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52120765A (en) | 1977-10-11 |