JPS5528753Y2 - - Google Patents
Info
- Publication number
- JPS5528753Y2 JPS5528753Y2 JP1976020125U JP2012576U JPS5528753Y2 JP S5528753 Y2 JPS5528753 Y2 JP S5528753Y2 JP 1976020125 U JP1976020125 U JP 1976020125U JP 2012576 U JP2012576 U JP 2012576U JP S5528753 Y2 JPS5528753 Y2 JP S5528753Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976020125U JPS5528753Y2 (en:Method) | 1976-02-24 | 1976-02-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976020125U JPS5528753Y2 (en:Method) | 1976-02-24 | 1976-02-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52113858U JPS52113858U (en:Method) | 1977-08-30 |
| JPS5528753Y2 true JPS5528753Y2 (en:Method) | 1980-07-09 |
Family
ID=28480159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976020125U Expired JPS5528753Y2 (en:Method) | 1976-02-24 | 1976-02-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5528753Y2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003073827A (ja) * | 2001-08-28 | 2003-03-12 | Applied Materials Inc | スパッタリング装置のマグネトロンユニット及びスパッタリング装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5965686B2 (ja) * | 2012-03-21 | 2016-08-10 | 株式会社アルバック | スパッタリング装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5295581A (en) * | 1976-02-09 | 1977-08-11 | Anelva Corp | Sputiering apparatus |
-
1976
- 1976-02-24 JP JP1976020125U patent/JPS5528753Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003073827A (ja) * | 2001-08-28 | 2003-03-12 | Applied Materials Inc | スパッタリング装置のマグネトロンユニット及びスパッタリング装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52113858U (en:Method) | 1977-08-30 |