JPS5528753Y2 - - Google Patents

Info

Publication number
JPS5528753Y2
JPS5528753Y2 JP1976020125U JP2012576U JPS5528753Y2 JP S5528753 Y2 JPS5528753 Y2 JP S5528753Y2 JP 1976020125 U JP1976020125 U JP 1976020125U JP 2012576 U JP2012576 U JP 2012576U JP S5528753 Y2 JPS5528753 Y2 JP S5528753Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976020125U
Other languages
Japanese (ja)
Other versions
JPS52113858U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1976020125U priority Critical patent/JPS5528753Y2/ja
Publication of JPS52113858U publication Critical patent/JPS52113858U/ja
Application granted granted Critical
Publication of JPS5528753Y2 publication Critical patent/JPS5528753Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1976020125U 1976-02-24 1976-02-24 Expired JPS5528753Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976020125U JPS5528753Y2 (cs) 1976-02-24 1976-02-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976020125U JPS5528753Y2 (cs) 1976-02-24 1976-02-24

Publications (2)

Publication Number Publication Date
JPS52113858U JPS52113858U (cs) 1977-08-30
JPS5528753Y2 true JPS5528753Y2 (cs) 1980-07-09

Family

ID=28480159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976020125U Expired JPS5528753Y2 (cs) 1976-02-24 1976-02-24

Country Status (1)

Country Link
JP (1) JPS5528753Y2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003073827A (ja) * 2001-08-28 2003-03-12 Applied Materials Inc スパッタリング装置のマグネトロンユニット及びスパッタリング装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5965686B2 (ja) * 2012-03-21 2016-08-10 株式会社アルバック スパッタリング装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295581A (en) * 1976-02-09 1977-08-11 Anelva Corp Sputiering apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003073827A (ja) * 2001-08-28 2003-03-12 Applied Materials Inc スパッタリング装置のマグネトロンユニット及びスパッタリング装置

Also Published As

Publication number Publication date
JPS52113858U (cs) 1977-08-30

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