JPS5527976B2 - - Google Patents

Info

Publication number
JPS5527976B2
JPS5527976B2 JP688475A JP688475A JPS5527976B2 JP S5527976 B2 JPS5527976 B2 JP S5527976B2 JP 688475 A JP688475 A JP 688475A JP 688475 A JP688475 A JP 688475A JP S5527976 B2 JPS5527976 B2 JP S5527976B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP688475A
Other languages
Japanese (ja)
Other versions
JPS5181488A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP688475A priority Critical patent/JPS5181488A/ja
Publication of JPS5181488A publication Critical patent/JPS5181488A/ja
Publication of JPS5527976B2 publication Critical patent/JPS5527976B2/ja
Granted legal-status Critical Current

Links

JP688475A 1975-01-14 1975-01-14 Waiyanorenketsusochi Granted JPS5181488A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP688475A JPS5181488A (ja) 1975-01-14 1975-01-14 Waiyanorenketsusochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP688475A JPS5181488A (ja) 1975-01-14 1975-01-14 Waiyanorenketsusochi

Publications (2)

Publication Number Publication Date
JPS5181488A JPS5181488A (ja) 1976-07-16
JPS5527976B2 true JPS5527976B2 (cs) 1980-07-24

Family

ID=11650649

Family Applications (1)

Application Number Title Priority Date Filing Date
JP688475A Granted JPS5181488A (ja) 1975-01-14 1975-01-14 Waiyanorenketsusochi

Country Status (1)

Country Link
JP (1) JPS5181488A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03289153A (ja) * 1990-04-05 1991-12-19 Dan Kagaku:Kk 半導体ウエハ支持台

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0322812Y2 (cs) * 1986-05-26 1991-05-17
WO2024081976A1 (en) * 2022-10-14 2024-04-18 SWANEPOEL, Wayne A securing assembly

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03289153A (ja) * 1990-04-05 1991-12-19 Dan Kagaku:Kk 半導体ウエハ支持台

Also Published As

Publication number Publication date
JPS5181488A (ja) 1976-07-16

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