JPS5527976B2 - - Google Patents
Info
- Publication number
- JPS5527976B2 JPS5527976B2 JP688475A JP688475A JPS5527976B2 JP S5527976 B2 JPS5527976 B2 JP S5527976B2 JP 688475 A JP688475 A JP 688475A JP 688475 A JP688475 A JP 688475A JP S5527976 B2 JPS5527976 B2 JP S5527976B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP688475A JPS5181488A (ja) | 1975-01-14 | 1975-01-14 | Waiyanorenketsusochi |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP688475A JPS5181488A (ja) | 1975-01-14 | 1975-01-14 | Waiyanorenketsusochi |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5181488A JPS5181488A (ja) | 1976-07-16 |
| JPS5527976B2 true JPS5527976B2 (OSRAM) | 1980-07-24 |
Family
ID=11650649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP688475A Granted JPS5181488A (ja) | 1975-01-14 | 1975-01-14 | Waiyanorenketsusochi |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5181488A (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03289153A (ja) * | 1990-04-05 | 1991-12-19 | Dan Kagaku:Kk | 半導体ウエハ支持台 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0322812Y2 (OSRAM) * | 1986-05-26 | 1991-05-17 | ||
| CN120584245A (zh) * | 2022-10-14 | 2025-09-02 | 保罗·迈克尔·戴维斯 | 固定组件 |
-
1975
- 1975-01-14 JP JP688475A patent/JPS5181488A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03289153A (ja) * | 1990-04-05 | 1991-12-19 | Dan Kagaku:Kk | 半導体ウエハ支持台 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5181488A (ja) | 1976-07-16 |