JPS5527476B2 - - Google Patents

Info

Publication number
JPS5527476B2
JPS5527476B2 JP1261675A JP1261675A JPS5527476B2 JP S5527476 B2 JPS5527476 B2 JP S5527476B2 JP 1261675 A JP1261675 A JP 1261675A JP 1261675 A JP1261675 A JP 1261675A JP S5527476 B2 JPS5527476 B2 JP S5527476B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1261675A
Other languages
Japanese (ja)
Other versions
JPS50119971A (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS50119971A publication Critical patent/JPS50119971A/ja
Publication of JPS5527476B2 publication Critical patent/JPS5527476B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/095—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having more than one photosensitive layer
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP1261675A 1974-02-28 1975-01-31 Expired JPS5527476B2 (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH286974A CH584422A5 (enrdf_load_html_response) 1974-02-28 1974-02-28

Publications (2)

Publication Number Publication Date
JPS50119971A JPS50119971A (enrdf_load_html_response) 1975-09-19
JPS5527476B2 true JPS5527476B2 (enrdf_load_html_response) 1980-07-21

Family

ID=4243404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1261675A Expired JPS5527476B2 (enrdf_load_html_response) 1974-02-28 1975-01-31

Country Status (6)

Country Link
JP (1) JPS5527476B2 (enrdf_load_html_response)
CH (1) CH584422A5 (enrdf_load_html_response)
DE (1) DE2459183C2 (enrdf_load_html_response)
FR (1) FR2262818B1 (enrdf_load_html_response)
GB (1) GB1443917A (enrdf_load_html_response)
IT (1) IT1027852B (enrdf_load_html_response)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4248960A (en) * 1978-01-23 1981-02-03 W. R. Grace & Co. Radiation responsive relief imageable plastic laminate
US4716097A (en) * 1986-02-03 1987-12-29 E. I. Du Pont De Nemours And Company Increased photopolymer photospeed employing yellow light preexposure
DE3626708A1 (de) * 1986-08-07 1988-02-11 Mania Gmbh Verfahren zur herstellung von leiterplatten

Also Published As

Publication number Publication date
JPS50119971A (enrdf_load_html_response) 1975-09-19
FR2262818B1 (enrdf_load_html_response) 1977-07-01
IT1027852B (it) 1978-12-20
DE2459183C2 (de) 1983-02-24
GB1443917A (en) 1976-07-28
FR2262818A1 (enrdf_load_html_response) 1975-09-26
DE2459183A1 (de) 1975-09-04
CH584422A5 (enrdf_load_html_response) 1977-01-31

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