JPS552736B2 - - Google Patents
Info
- Publication number
- JPS552736B2 JPS552736B2 JP5854972A JP5854972A JPS552736B2 JP S552736 B2 JPS552736 B2 JP S552736B2 JP 5854972 A JP5854972 A JP 5854972A JP 5854972 A JP5854972 A JP 5854972A JP S552736 B2 JPS552736 B2 JP S552736B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5854972A JPS552736B2 (https=) | 1972-06-14 | 1972-06-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5854972A JPS552736B2 (https=) | 1972-06-14 | 1972-06-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4918571A JPS4918571A (https=) | 1974-02-19 |
| JPS552736B2 true JPS552736B2 (https=) | 1980-01-22 |
Family
ID=13087525
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5854972A Expired JPS552736B2 (https=) | 1972-06-14 | 1972-06-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS552736B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55151614U (https=) * | 1979-04-19 | 1980-11-01 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5846699A (ja) * | 1981-09-14 | 1983-03-18 | 株式会社日立製作所 | 薄膜形成方法 |
-
1972
- 1972-06-14 JP JP5854972A patent/JPS552736B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55151614U (https=) * | 1979-04-19 | 1980-11-01 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4918571A (https=) | 1974-02-19 |