JPS5527241Y2 - - Google Patents

Info

Publication number
JPS5527241Y2
JPS5527241Y2 JP1974057927U JP5792774U JPS5527241Y2 JP S5527241 Y2 JPS5527241 Y2 JP S5527241Y2 JP 1974057927 U JP1974057927 U JP 1974057927U JP 5792774 U JP5792774 U JP 5792774U JP S5527241 Y2 JPS5527241 Y2 JP S5527241Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1974057927U
Other languages
Japanese (ja)
Other versions
JPS50146478U (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974057927U priority Critical patent/JPS5527241Y2/ja
Publication of JPS50146478U publication Critical patent/JPS50146478U/ja
Application granted granted Critical
Publication of JPS5527241Y2 publication Critical patent/JPS5527241Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1974057927U 1974-05-20 1974-05-20 Expired JPS5527241Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974057927U JPS5527241Y2 (cg-RX-API-DMAC7.html) 1974-05-20 1974-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974057927U JPS5527241Y2 (cg-RX-API-DMAC7.html) 1974-05-20 1974-05-20

Publications (2)

Publication Number Publication Date
JPS50146478U JPS50146478U (cg-RX-API-DMAC7.html) 1975-12-04
JPS5527241Y2 true JPS5527241Y2 (cg-RX-API-DMAC7.html) 1980-06-30

Family

ID=28214611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974057927U Expired JPS5527241Y2 (cg-RX-API-DMAC7.html) 1974-05-20 1974-05-20

Country Status (1)

Country Link
JP (1) JPS5527241Y2 (cg-RX-API-DMAC7.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147112A (ja) * 1982-02-26 1983-09-01 Fujitsu Ltd 結晶成長装置
JP7738414B2 (ja) * 2021-06-21 2025-09-12 パナソニックホールディングス株式会社 Iii族化合物半導体結晶の製造装置

Also Published As

Publication number Publication date
JPS50146478U (cg-RX-API-DMAC7.html) 1975-12-04

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