JPS5527032A - Washing method by distilled liquid - Google Patents
Washing method by distilled liquidInfo
- Publication number
- JPS5527032A JPS5527032A JP9893878A JP9893878A JPS5527032A JP S5527032 A JPS5527032 A JP S5527032A JP 9893878 A JP9893878 A JP 9893878A JP 9893878 A JP9893878 A JP 9893878A JP S5527032 A JPS5527032 A JP S5527032A
- Authority
- JP
- Japan
- Prior art keywords
- washing method
- distilled liquid
- distilled
- liquid
- washing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9893878A JPS5527032A (en) | 1978-08-14 | 1978-08-14 | Washing method by distilled liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9893878A JPS5527032A (en) | 1978-08-14 | 1978-08-14 | Washing method by distilled liquid |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5527032A true JPS5527032A (en) | 1980-02-26 |
Family
ID=14233050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9893878A Pending JPS5527032A (en) | 1978-08-14 | 1978-08-14 | Washing method by distilled liquid |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5527032A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6336535A (en) * | 1986-07-28 | 1988-02-17 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Method of removing undersirable particles from substrate surface |
JPH0372626A (en) * | 1989-05-06 | 1991-03-27 | Dainippon Screen Mfg Co Ltd | Cleaning treatment of substrate and device |
JPH03284842A (en) * | 1990-03-30 | 1991-12-16 | Dainippon Screen Mfg Co Ltd | Substrate washing treatment apparatus |
-
1978
- 1978-08-14 JP JP9893878A patent/JPS5527032A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6336535A (en) * | 1986-07-28 | 1988-02-17 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Method of removing undersirable particles from substrate surface |
JP2517607B2 (en) * | 1986-07-28 | 1996-07-24 | フィリップス エレクトロニクス ネムローゼ フェンノートシャップ | Method of removing particles from substrate surface |
JPH0372626A (en) * | 1989-05-06 | 1991-03-27 | Dainippon Screen Mfg Co Ltd | Cleaning treatment of substrate and device |
JPH06103685B2 (en) * | 1989-05-06 | 1994-12-14 | 大日本スクリーン製造株式会社 | Substrate cleaning method and apparatus |
JPH03284842A (en) * | 1990-03-30 | 1991-12-16 | Dainippon Screen Mfg Co Ltd | Substrate washing treatment apparatus |
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