JPS5527032A - Washing method by distilled liquid - Google Patents

Washing method by distilled liquid

Info

Publication number
JPS5527032A
JPS5527032A JP9893878A JP9893878A JPS5527032A JP S5527032 A JPS5527032 A JP S5527032A JP 9893878 A JP9893878 A JP 9893878A JP 9893878 A JP9893878 A JP 9893878A JP S5527032 A JPS5527032 A JP S5527032A
Authority
JP
Japan
Prior art keywords
washing method
distilled liquid
distilled
liquid
washing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9893878A
Other languages
Japanese (ja)
Inventor
Masao Kanazawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9893878A priority Critical patent/JPS5527032A/en
Publication of JPS5527032A publication Critical patent/JPS5527032A/en
Pending legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
JP9893878A 1978-08-14 1978-08-14 Washing method by distilled liquid Pending JPS5527032A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9893878A JPS5527032A (en) 1978-08-14 1978-08-14 Washing method by distilled liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9893878A JPS5527032A (en) 1978-08-14 1978-08-14 Washing method by distilled liquid

Publications (1)

Publication Number Publication Date
JPS5527032A true JPS5527032A (en) 1980-02-26

Family

ID=14233050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9893878A Pending JPS5527032A (en) 1978-08-14 1978-08-14 Washing method by distilled liquid

Country Status (1)

Country Link
JP (1) JPS5527032A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336535A (en) * 1986-07-28 1988-02-17 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Method of removing undersirable particles from substrate surface
JPH0372626A (en) * 1989-05-06 1991-03-27 Dainippon Screen Mfg Co Ltd Cleaning treatment of substrate and device
JPH03284842A (en) * 1990-03-30 1991-12-16 Dainippon Screen Mfg Co Ltd Substrate washing treatment apparatus

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336535A (en) * 1986-07-28 1988-02-17 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Method of removing undersirable particles from substrate surface
JP2517607B2 (en) * 1986-07-28 1996-07-24 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ Method of removing particles from substrate surface
JPH0372626A (en) * 1989-05-06 1991-03-27 Dainippon Screen Mfg Co Ltd Cleaning treatment of substrate and device
JPH06103685B2 (en) * 1989-05-06 1994-12-14 大日本スクリーン製造株式会社 Substrate cleaning method and apparatus
JPH03284842A (en) * 1990-03-30 1991-12-16 Dainippon Screen Mfg Co Ltd Substrate washing treatment apparatus

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