JPS5526616B2 - - Google Patents

Info

Publication number
JPS5526616B2
JPS5526616B2 JP2100575A JP2100575A JPS5526616B2 JP S5526616 B2 JPS5526616 B2 JP S5526616B2 JP 2100575 A JP2100575 A JP 2100575A JP 2100575 A JP2100575 A JP 2100575A JP S5526616 B2 JPS5526616 B2 JP S5526616B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2100575A
Other languages
Japanese (ja)
Other versions
JPS5197369A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50021005A priority Critical patent/JPS5197369A/ja
Publication of JPS5197369A publication Critical patent/JPS5197369A/ja
Publication of JPS5526616B2 publication Critical patent/JPS5526616B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP50021005A 1975-02-21 1975-02-21 Handotaisoshino denkyokuno seizohoho Granted JPS5197369A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50021005A JPS5197369A (en) 1975-02-21 1975-02-21 Handotaisoshino denkyokuno seizohoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50021005A JPS5197369A (en) 1975-02-21 1975-02-21 Handotaisoshino denkyokuno seizohoho

Publications (2)

Publication Number Publication Date
JPS5197369A JPS5197369A (en) 1976-08-26
JPS5526616B2 true JPS5526616B2 (enrdf_load_stackoverflow) 1980-07-15

Family

ID=12042951

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50021005A Granted JPS5197369A (en) 1975-02-21 1975-02-21 Handotaisoshino denkyokuno seizohoho

Country Status (1)

Country Link
JP (1) JPS5197369A (enrdf_load_stackoverflow)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513962A (en) * 1978-07-17 1980-01-31 Nec Corp Method of processing very fine electrode
JPH0758714B2 (ja) * 1985-06-25 1995-06-21 株式会社東芝 ＧａＡｓ半導体装置の製造方法
JPS6240781A (ja) * 1985-08-15 1987-02-21 Toshiba Corp シヨツトキ−ゲ−ト型電界効果トランジスタの製造方法
JP2932475B2 (ja) * 1988-02-05 1999-08-09 ソニー株式会社 半導体装置の製造方法
KR950000522B1 (ko) * 1991-11-25 1995-01-24 재단법인 한국전자통신연구소 수신용 광전집적 소자 및 그 제조방법
TW418539B (en) * 1998-05-29 2001-01-11 Samsung Electronics Co Ltd A method for forming TFT in liquid crystal display

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5329989B2 (enrdf_load_stackoverflow) * 1971-10-22 1978-08-24

Also Published As

Publication number Publication date
JPS5197369A (en) 1976-08-26

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