JPS5526365B2 - - Google Patents
Info
- Publication number
- JPS5526365B2 JPS5526365B2 JP14119475A JP14119475A JPS5526365B2 JP S5526365 B2 JPS5526365 B2 JP S5526365B2 JP 14119475 A JP14119475 A JP 14119475A JP 14119475 A JP14119475 A JP 14119475A JP S5526365 B2 JPS5526365 B2 JP S5526365B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14119475A JPS5265328A (en) | 1975-11-27 | 1975-11-27 | Vaporizing burner |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14119475A JPS5265328A (en) | 1975-11-27 | 1975-11-27 | Vaporizing burner |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5265328A JPS5265328A (en) | 1977-05-30 |
| JPS5526365B2 true JPS5526365B2 (ref) | 1980-07-12 |
Family
ID=15286335
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14119475A Granted JPS5265328A (en) | 1975-11-27 | 1975-11-27 | Vaporizing burner |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5265328A (ref) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102816838B1 (ko) * | 2024-01-10 | 2025-06-04 | 조동주 | 반도체 식각장비용 캐리어 플레이트 제조방법 |
-
1975
- 1975-11-27 JP JP14119475A patent/JPS5265328A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102816838B1 (ko) * | 2024-01-10 | 2025-06-04 | 조동주 | 반도체 식각장비용 캐리어 플레이트 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5265328A (en) | 1977-05-30 |