JPS5526189B2 - - Google Patents
Info
- Publication number
- JPS5526189B2 JPS5526189B2 JP2505276A JP2505276A JPS5526189B2 JP S5526189 B2 JPS5526189 B2 JP S5526189B2 JP 2505276 A JP2505276 A JP 2505276A JP 2505276 A JP2505276 A JP 2505276A JP S5526189 B2 JPS5526189 B2 JP S5526189B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2505276A JPS52108350A (en) | 1976-03-10 | 1976-03-10 | Ion etching apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2505276A JPS52108350A (en) | 1976-03-10 | 1976-03-10 | Ion etching apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52108350A JPS52108350A (en) | 1977-09-10 |
| JPS5526189B2 true JPS5526189B2 (cs) | 1980-07-11 |
Family
ID=12155136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2505276A Granted JPS52108350A (en) | 1976-03-10 | 1976-03-10 | Ion etching apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52108350A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2542580B2 (ja) * | 1986-04-03 | 1996-10-09 | 益弘 小駒 | プラスチック表面改質方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5620696B2 (cs) * | 1972-06-30 | 1981-05-15 |
-
1976
- 1976-03-10 JP JP2505276A patent/JPS52108350A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52108350A (en) | 1977-09-10 |