JPS5526036Y2 - - Google Patents
Info
- Publication number
- JPS5526036Y2 JPS5526036Y2 JP13602275U JP13602275U JPS5526036Y2 JP S5526036 Y2 JPS5526036 Y2 JP S5526036Y2 JP 13602275 U JP13602275 U JP 13602275U JP 13602275 U JP13602275 U JP 13602275U JP S5526036 Y2 JPS5526036 Y2 JP S5526036Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13602275U JPS5526036Y2 (pm) | 1975-10-03 | 1975-10-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13602275U JPS5526036Y2 (pm) | 1975-10-03 | 1975-10-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5249351U JPS5249351U (pm) | 1977-04-08 |
| JPS5526036Y2 true JPS5526036Y2 (pm) | 1980-06-23 |
Family
ID=28616041
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13602275U Expired JPS5526036Y2 (pm) | 1975-10-03 | 1975-10-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5526036Y2 (pm) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0715898B2 (ja) * | 1984-12-24 | 1995-02-22 | 株式会社日立製作所 | マイクロ波プラズマ処理装置 |
-
1975
- 1975-10-03 JP JP13602275U patent/JPS5526036Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5249351U (pm) | 1977-04-08 |